電子氣體是半導(dǎo)體制造的關(guān)鍵，高純電子級二氧化碳在集成電路中尤為重要。新國標(biāo)《GB/T43772-2024》對二氧化碳純度有嚴(yán)格要求。
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國際半導(dǎo)體設(shè)備與材料組織（SEMI ）在2018年C3.57-0312中，對二氧化碳產(chǎn)品的純度要求要達到 99.999% 以上，雜質(zhì)限量在ppm級別。隨著集成電路行業(yè)的發(fā)展，我國新制定的國標(biāo)《GB/T43772-2024 電子氣體 二氧化碳》中對二氧化碳品的純度要求已達到 5N以上，對氣體雜質(zhì)要求達1~5ppm，其中總硫要求低至10ppb
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本文件規(guī)定了二氧化碳的技術(shù)要求、采樣、試驗方法、檢驗規(guī)則、標(biāo)志、包裝、運輸、貯存及安全信息的要求。
本文件適用于由高純二氧化碳經(jīng)純化制備的電子用二氧化碳。
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名稱：預(yù)分離柱
固定相：高分子聚合物（乙基苯乙烯和二乙烯苯的共聚物）
規(guī)格：4m*3mm（內(nèi)徑）
粒度：0.18mm-0.25mm
型號：HH-GFZ-IV
材質(zhì)：不銹鋼
應(yīng)用：GB_T 43772-2024 電子氣體 二氧化碳中總硫測定
適用于：安捷倫，島津，賽默飛，瓦里安，布魯克，PE
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浩瀚色譜（山東）應(yīng)用技術(shù)開發(fā)有限公司，研制的《電子氣二氧化碳中總硫測定預(yù)分離色譜柱》柱效高，預(yù)分離好，均不干擾總硫的測定，面積外標(biāo)法定量，結(jié)果滿意。
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Electronic gases are crucial for semiconductor manufacturing, and high-purity electronic grade carbon dioxide is particularly important in integrated circuits. The new national standard GB/T43772-2024 has strict requirements for the purity of carbon dioxide.
According to the International Semiconductor Equipment and Materials Organization (SEMI) in C3.57-0312 of 2018, the purity requirement for carbon dioxide products must be above 99.999%, with impurity limits at the ppm level. With the development of the integrated circuit industry, the purity requirement for carbon dioxide products in China's newly formulated national standard "GB/T43772-2024 Electronic Gas Carbon Dioxide" has reached 5N or above, and the requirement for gas impurities is 1-5ppm, with a total sulfur requirement as low as 10pppb
This document specifies the technical requirements, sampling, testing methods, inspection rules, labeling, packaging, transportation, storage, and safety information requirements for carbon dioxide.
This document applies to electronic carbon dioxide prepared by purifying high-purity carbon dioxide.
Name: Pre separation column
Fixed phase: Polymer (copolymer of ethylstyrene and divinylbenzene)
Specification: 4m * 3mm (inner diameter)
Particle size: 0.18mm-0.25mm
model: HH-GFZ-IV
Material: Stainless steel
Application: GB_T 43772-2024 Determination of Total Sulfur in Electronic Gas Carbon Dioxide
Applicable to: Agilent, Shimadzu, Thermo Fisher, Varian, Brooke, PE
Haohan Chromatography (Shandong) Application Technology Development Co., Ltd. has developed a "Pre separation Chromatographic Column for Total Sulfur Determination in Electronic Gas Carbon Dioxide" with high column efficiency, good pre separation, and no interference with the determination of total sulfur. The quantitative method is based on external standard method with satisfactory results.
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