This standard is applicable to electronic grade oxygen used in the production process of semiconductor discrete devices and integrated circuits. According to its usage requirements, electronic grade oxygen is divided into two levels, with the code of electronic grade I oxygen being DZO2- I; Grade II argon code: DZO2- II
SJ 2796-1987 Electronic Grade Oxygen
Chromatographic Column: GDX-104
Specification: 2m * 2mm
Particle size: 60-80 mesh
Application: Shimadzu GC14C, GC-2010, GC-2014, GC-2030, Agilent 6890789088608890; Thermo Fisher, Varian, Brooke
Separation: SJ 2796-1987 Determination of Trace Methane in Electronic Grade Oxygen - Hydrogen Flame Chromatography Method
Features: Good separation, symmetrical peak shape, no tail detachment
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本標(biāo)準(zhǔn)適用于半導(dǎo)體分立器件和集成電路生產(chǎn)工藝過(guò)程中使用的電子級(jí)氧、按其使用要求電子級(jí)氧分為兩級(jí)，代號(hào)為：電子 Ⅰ級(jí)氧代號(hào)為：DZO2-Ⅰ ; Ⅱ級(jí)氬代號(hào)為：DZO2- Ⅱ
SJ 2796-1987電子級(jí)氧
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色譜柱：GDX-104
規(guī)格：2m*2mm
粒度：60-80目
應(yīng)用：島津GC14C，GC-2010，GC-2014，GC-2030,安捷倫6890,7890,8860,8890；賽默飛，瓦里安，布魯克
分離：SJ 2796-1987電子級(jí)氧中痕量甲烷的測(cè)定方法 氫焰色譜法
特點(diǎn)：分離好，峰型對(duì)稱，不脫尾
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