本標(biāo)準(zhǔn)規(guī)定了多晶硅用回收氫氣中氯化氫,氮?dú)?氧氣,總碳含量的氣相色譜測(cè)定方法.本標(biāo)準(zhǔn)適用于多晶硅用回收氫氣的氯化氫,氮?dú)?氧氣,總碳含量的測(cè)定,測(cè)定范圍為(0-10000)×10-6
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測(cè)定氯化氫的方法有離子色譜法、分光光度法、紅外光譜法和填充柱氣相色譜法等,采用離子色譜法時(shí)需將氯化氫轉(zhuǎn)化為Cl-進(jìn)行檢測(cè),存在操作繁瑣、耗氣量大、耗時(shí)長(zhǎng)等缺點(diǎn)。
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浩瀚色譜研發(fā)HH-1毛細(xì)管柱測(cè)定多晶硅尾氣中氯化氫，柱效高，分離好，結(jié)果滿意。
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名稱：毛細(xì)管柱
固定液：二甲基聚硅氧烷
規(guī)格：30m*0.53mm*1.5um
型號(hào)：HH-1
應(yīng)用：T/CNIA 0016-2019多晶硅用回收氫氣中氯化氫,氮?dú)?氧氣,總碳含量的氣相色譜測(cè)定
適用于：安捷倫6890 ，7890,7820,8860,8890，島津GC-14C，GC-2010，GC-2018，GC-2030；賽默飛，瓦里安，布魯克，PE，磐諾，福立，天瑞，天美，科創(chuàng)，川儀，華愛，東西電子，北分瑞利等
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This standard specifies the gas chromatography method for determining the content of hydrogen chloride, nitrogen, oxygen, and total carbon in recycled hydrogen gas for polycrystalline silicon. This standard is applicable to the determination of hydrogen chloride, nitrogen, oxygen, and total carbon content in recycled hydrogen gas for polycrystalline silicon, with a measurement range of (0-10000) × 10-6
The methods for determining hydrogen chloride include ion chromatography, spectrophotometry, infrared spectroscopy, and packed column gas chromatography. When using ion chromatography, hydrogen chloride needs to be converted to Cl - for detection, which has the disadvantages of cumbersome operation, high gas consumption, and long time consumption.
Haohan Chromatography developed HH-1 capillary column for the determination of hydrogen chloride in polycrystalline silicon exhaust gas, with high column efficiency, good separation, and satisfactory results.
Name: Capillary Column
Fixed Liquid: Dimethyl Polysiloxane
Specification: 30m * 0.53mm * 1.5um
Model: HH-1
Application: Gas Chromatography Determination of Hydrogen Chloride, Nitrogen, Oxygen, and Total Carbon Content in Recycled Hydrogen for Polycrystalline Silicon (T/CNIA 0016-2019)
Applicable to: Agilent 68907890782088608890, Shimadzu GC-14C, GC-2010，GC-2018，GC-2030； Thermo Fisher, Varian, Brooke, PE, Panno, Fuli, Tianrui, Tianmei, Kechuang, Chuanyi, Huaai, Dongxi Electronics, Beifen Ruili, etc
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